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Proceedings Paper

Novel heterometer for measuring surface roughness
Author(s): Zhaoxia Wu; Rui Ren; Zhiquan Li
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Paper Abstract

The supersmooth surface roughness measurement is becoming more and more important with the development of the processing technique. This paper studies an on-line measurement system of the supersmooth surface roughness using optical heterodyne method. The simple structure and strong practicability of this system are researched. The experimental results show that this system has the feature of the good stability and high measured accuracy.

Paper Details

Date Published: 20 June 2002
PDF: 5 pages
Proc. SPIE 4777, Interferometry XI: Techniques and Analysis, (20 June 2002); doi: 10.1117/12.472243
Show Author Affiliations
Zhaoxia Wu, Yanshan Univ. (China)
Rui Ren, Yanshan Univ. (China)
Zhiquan Li, Yanshan Univ. (China)


Published in SPIE Proceedings Vol. 4777:
Interferometry XI: Techniques and Analysis
Katherine Creath; Joanna Schmit, Editor(s)

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