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Proceedings Paper

High-resolution surface feature evaluation using multiwavelength optical transforms
Author(s): Boris Spektor; Gregory Toker; Joseph Shamir; Michael Friedman; Andrei Brunfeld
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Paper Abstract

Surface feature evaluation with resolution beyond the classical diffraction limit can be achieved by a combined space--frequency representation of the scattered field. This was demonstrated in a measuring procedure where the surface was consecutively illuminated by a collection of focused beams and the diffracted data was measured in the far field. Mathematically, if the focused beam has a Gaussian profile, the optical system implements a Gabor transform. Other transformations, such as wavelet transforms can be obtained by properly structuring the illuminating beam. This work presents an approach where structured beams at several wavelengths are used. This additional information gathered by this procedure allows an increased resolution and the reduction of ambiguities that may occur in the analysis of single wavelength measurements.

Paper Details

Date Published: 20 June 2002
PDF: 7 pages
Proc. SPIE 4777, Interferometry XI: Techniques and Analysis, (20 June 2002); doi: 10.1117/12.472234
Show Author Affiliations
Boris Spektor, Technion--Israel Institute of Technology (Israel)
Gregory Toker, Technion--Israel Institute of Technology (Israel)
Joseph Shamir, Technion--Israel Institute of Technology (Israel)
Michael Friedman, Technion--Israel Institute of Technology (Israel)
Andrei Brunfeld, Amsys, Ltd. (United States)

Published in SPIE Proceedings Vol. 4777:
Interferometry XI: Techniques and Analysis
Katherine Creath; Joanna Schmit, Editor(s)

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