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Proceedings Paper

In-line optical surface roughness determination by laser scanning
Author(s): Gregory Toker; Andrei Brunfeld; Joseph Shamir; Boris Spektor; Evan F. Cromwell; Johann F. Adam
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Paper Abstract

Reliable in-line and in-situ measurement of structure of highly polished surfaces remains a major challenge for the modern industry. Evaluation of the wavefront of a scanning laser beam reflected from a surface allows one to establish a direct correlation between the statistics of the optical signal and the surface roughness. Phase structuring of the laser beam greatly increases the height sensitivity down to the nanometer level. High sampling rate allows one to collect a very large number of sampled data and provide a complete analysis of the surface structure rather than a single parameter such as the rms roughness.

Paper Details

Date Published: 20 June 2002
PDF: 7 pages
Proc. SPIE 4777, Interferometry XI: Techniques and Analysis, (20 June 2002); doi: 10.1117/12.472232
Show Author Affiliations
Gregory Toker, Amsys, Ltd. (Israel)
Andrei Brunfeld, Amsys, Ltd. (United States)
Joseph Shamir, Technion--Israel Institute of Technology (Israel)
Boris Spektor, Technion--Israel Institute of Technology (Israel)
Evan F. Cromwell, Consultant (United States)
Johann F. Adam, Consultant (United States)

Published in SPIE Proceedings Vol. 4777:
Interferometry XI: Techniques and Analysis
Katherine Creath; Joanna Schmit, Editor(s)

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