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Proceedings Paper

Quantitative Zernike phase-contrast microscopy by use of structured birefringent pupil-filters and phase-shift evaluation
Author(s): Michael Totzeck; Norbert Kerwien; Alexander V. Tavrov; Eva Rosenthal; Hans J. Tiziani
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Paper Abstract

Zernike phase-contrast is a well known and a often used method for the visualization of phase-structures. Because it applies a fixed phase-shift between the zero'th order and the scattered field, quantitative phase-measurements are only possible for small phase-shifts but not for arbitrary ones. The basic idea of the presented generalization of the method is to use polarization-optical pupil-filters for a separation of the zero'th from the higher orders in combination with phase-shifting polarization interferometry: In the simplest version, a drilled half-wave retarder is used in connection with linearly polarized illumination. This pupil-filter rotates the polarization of the scattered field by (pi) /2 while the dc-term is unaffected because it traverses the hole. The transmitted field is analyzed by phase-shifting polarization-interferometry: Using a liquid-crystal phase shifter (LCPS), both components can be phase-shifted relative to each other; they interfere at a subsequent analyzer. By means of a signal-evaluation according to phase-shifting interferometry, the complex amplitude of the scattered field can be determined relative to the dc-term enabling a computation of the complete field's phase. The method works for general complex objects. The applications we consider are in the field of microstructure inspection.

Paper Details

Date Published: 20 June 2002
PDF: 11 pages
Proc. SPIE 4777, Interferometry XI: Techniques and Analysis, (20 June 2002); doi: 10.1117/12.472223
Show Author Affiliations
Michael Totzeck, Univ. Stuttgart (Germany)
Norbert Kerwien, Univ. Stuttgart (Germany)
Alexander V. Tavrov, Univ. Stuttgart (Germany)
Eva Rosenthal, Univ. Stuttgart (Germany)
Hans J. Tiziani, Univ. Stuttgart (Germany)

Published in SPIE Proceedings Vol. 4777:
Interferometry XI: Techniques and Analysis
Katherine Creath; Joanna Schmit, Editor(s)

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