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Proceedings Paper

Improved algorithms for wavelength scanning interferometry: application to the simultaneous measurement of surface topography and optical thickness variation in a transparent parallel plate
Author(s): Kenichi Hibino; Bozenko F. Oreb; Philip S. Fairman
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Paper Abstract

Wavelength scanning interferometry allows the simultaneous measurement of the surface profile and the optical thickness variation of a parallel plate. However, it is necessary to evaluate the modulation frequencies of the signal and noise which depend on the optical thickness and dispersion of the test plate. New nineteen-sample, wavelength scanning algorithms allow variation in these parameters and give a measurement resolution of 1-2 nanometers rms. Measurement of a BK7 near-parallel plate of 250 mm diameter and 25 mm thickness was demonstrated in a Fizeau interferometer.

Paper Details

Date Published: 20 June 2002
PDF: 8 pages
Proc. SPIE 4777, Interferometry XI: Techniques and Analysis, (20 June 2002); doi: 10.1117/12.472221
Show Author Affiliations
Kenichi Hibino, CSIRO (Japan)
Bozenko F. Oreb, CSIRO (Australia)
Philip S. Fairman, CSIRO (Australia)

Published in SPIE Proceedings Vol. 4777:
Interferometry XI: Techniques and Analysis
Katherine Creath; Joanna Schmit, Editor(s)

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