Share Email Print
cover

Proceedings Paper

Twin-rainbow metrology
Author(s): Charles L. Adler; James A. Lock; Brian R. Keating
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

In this document, we describe twin-rainbow metrology, a non-invasive optical technique for measurement of the thicknesses of thin solid and liquid films to sub-micron accuracy. TRM allows measurement of coating thicknesses in two separate ways: first, directly, by a measurement of the difference between two scattering angles; ; and second, by the analysis of a Moire pattern found in the superposition of two sets of interference fringes. In this paper we will examine the conditions under which twin-rainbow metrology can be used, the accuracy of measurements made by it, and its potential applications.

Paper Details

Date Published: 20 June 2002
PDF: 10 pages
Proc. SPIE 4777, Interferometry XI: Techniques and Analysis, (20 June 2002); doi: 10.1117/12.472220
Show Author Affiliations
Charles L. Adler, St. Mary's College of Maryland (United States)
James A. Lock, Cleveland State Univ. (United States)
Brian R. Keating, St. Mary's College of Maryland (United States)


Published in SPIE Proceedings Vol. 4777:
Interferometry XI: Techniques and Analysis
Katherine Creath; Joanna Schmit, Editor(s)

© SPIE. Terms of Use
Back to Top