Share Email Print

Proceedings Paper

Synthetic spatial coherence function for optical tomography and profilometry: simultaneous realization of longitudinal coherence scan and phase shift
Author(s): Zhihui Duan; Mark Gokhler; Joseph Rosen; Hirokazu Kozaki; Nobuo Ishii; Mitsuo Takeda
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

A new scheme for synthesizing three-dimensional longitudinal spatial coherence function is proposed. By manipulating the irradiance of an extended quasi-monochromatic spatially incoherent source with a spatial light modulator, we generated a special optical field that exhibits high coherence selectively for the specified location along the optical axis of propagation and for the specified inclination between the two mirrors in the interferometer. The feasibility of the proposed principle is demonstrated by measuring a step height made by standard gauge blocks. The proposed scheme permits one to perform phase shift without recourse to mechanical movement. The quantitative experimental proof of the principle is presented.

Paper Details

Date Published: 20 June 2002
PDF: 8 pages
Proc. SPIE 4777, Interferometry XI: Techniques and Analysis, (20 June 2002); doi: 10.1117/12.472210
Show Author Affiliations
Zhihui Duan, Univ. of Science and Technology of China (China)
Mark Gokhler, Ben-Gurion Univ. of the Negev (Israel)
Joseph Rosen, Ben-Gurion Univ. of the Negev (Israel)
Hirokazu Kozaki, Univ. of Electro-Communications (Japan)
Nobuo Ishii, Univ. of Electro-Communications (Japan)
Mitsuo Takeda, Univ. of Electro-Communications (Japan)

Published in SPIE Proceedings Vol. 4777:
Interferometry XI: Techniques and Analysis
Katherine Creath; Joanna Schmit, Editor(s)

© SPIE. Terms of Use
Back to Top