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Proceedings Paper

White-light interferometry via an endoscope
Author(s): Michael W. Lindner
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Paper Abstract

White-light interferometry is a powerful tool for high resolution measurements on rough surfaces. The technology can be used for roughness measurements on technical surfaces with sub-micrometers tolerances. However, in automotive industry the surface of interest may be located inside a small drilling. In this case the surface properties cannot be measured by conventional white-light interferometry. For this purpose we introduce the concept of white-light interferometry via an endoscope. The setup uses a Michelson-Interferometer and the endoscope is placed into the object arm. The endoscope produces several intermediate images of the object within the object arm. In order to approximately gain a Linnik-setup we insert a second endoscope into the reference arm. We investigate different concepts in order to perform a depth scan: A scan of the reference mirror, a scan of the object and a new intermediate image scan. By using this intermediate image scan, the measuring range in depth is not limited by the aperture of the endoscope and each point of the object is measured with the maximum lateral resolution. Feasibility experiments have been performed in our laboratory. First measurement results are presented and benefits and limitations of white-light interferometry via an endoscope are discussed.

Paper Details

Date Published: 20 June 2002
PDF: 12 pages
Proc. SPIE 4777, Interferometry XI: Techniques and Analysis, (20 June 2002); doi: 10.1117/12.472208
Show Author Affiliations
Michael W. Lindner, Robert Bosch GmbH (Germany)


Published in SPIE Proceedings Vol. 4777:
Interferometry XI: Techniques and Analysis
Katherine Creath; Joanna Schmit, Editor(s)

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