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Proceedings Paper

Simulation of local layer-thickness deviation on multilayer diffraction
Author(s): Y. P. Guo; X. C. He; S. V. Redko; Z. Q. Wu
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Paper Abstract

Recent investigation on multilayer films with a local layer-thickness deviation has been performed. This kind of deviation may occur at any position in the multilayer. Simulated example of W/C, W/Si, and Pd/Si multilayers for CuK(alpha) and CuL(alpha) diffractions with different layer parameters as well as various amounts of the local deviations show quite different behaviors. The results show that the diffraction profile for a local deviation A' equals A+ (Delta) d or B' equals B+ (Delta) d is nearly antisymmetric to that for A' equals A- (Delta) d or B' equals B- (Delta) d and the appearance of double peaks is affected by both of the position and amount of the local deviation. Explanation has been carried out by the amplitude-phase diagrams.

Paper Details

Date Published: 1 November 1991
PDF: 5 pages
Proc. SPIE 1519, International Conference on Thin Film Physics and Applications, (1 November 1991); doi: 10.1117/12.47215
Show Author Affiliations
Y. P. Guo, Univ. of Science and Technology of China (China)
X. C. He, Univ. of Science and Technology of China (China)
S. V. Redko, Moscow Univ. (Russia)
Z. Q. Wu, Univ. of Science and Technology of China (China)


Published in SPIE Proceedings Vol. 1519:
International Conference on Thin Film Physics and Applications

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