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Proceedings Paper

Investigation on the anomalous structure of the nanocrystal Ti and Zr films
Author(s): W. Shi; J. Kong; H. Shen; Guo-Ping Du; W. Yao; Zhen Zhong Qi
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Paper Abstract

The nanocrystal Ti and Zr films were prepared by dc magnetron sputtering method on a liquid N2 cooled copper substrate using Ti and Zr metal targets, respectively. The grain size of the Ti and Zr films is in the range of 5 - 12 nm, determined by both TEM observation and x- ray diffraction patterns using Warren-Averbach analysis. The structure anomaly for Ti and Zr films are found by means of electron diffraction as well as x-ray diffraction. The results of x- ray diffraction show that they are typical bcc structure for Ti films, which appears only at high temperature (more than 885 degree(s)C). The tattice parameter is 0.33178 nm close to that of the diffraction data extended from Ta-Ti alloys (JCPDS-5-628). For Zr nanocrystal films, the x-ray diffraction patterns show that it is (omega) -phase which appears only at high pressure above 39 kbar.

Paper Details

Date Published: 1 November 1991
PDF: 4 pages
Proc. SPIE 1519, International Conference on Thin Film Physics and Applications, (1 November 1991); doi: 10.1117/12.47214
Show Author Affiliations
W. Shi, Institute of Solid State Physics (China)
J. Kong, Institute of Solid State Physics (China)
H. Shen, Institute of Solid State Physics (China)
Guo-Ping Du, Institute of Solid State Physics (China)
W. Yao, Institute of Solid State Physics (China)
Zhen Zhong Qi, Institute of Solid State Physics (China)


Published in SPIE Proceedings Vol. 1519:
International Conference on Thin Film Physics and Applications

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