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Proceedings Paper

Investigation into the characteristics of a-C:H films irradiated by electron beam
Author(s): Shulin Gu; Yuliang L. He; Zhi Chao Wang
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Paper Abstract

The characteristics of a-C:H films irradiated by different doses of electron beam have been studied by x-ray diffraction. IR absorption, Raman scattering, and resonant nuclear reaction. Such irradiation can lead the structure of a-C:H films to change in a different degree. The proportions of diamond crystalline and graphite structures in a-C:H films have a proper change simultaneously. The experimental results show a relationship to the action of hydrogen and a proper explanation is given.

Paper Details

Date Published: 1 November 1991
PDF: 4 pages
Proc. SPIE 1519, International Conference on Thin Film Physics and Applications, (1 November 1991); doi: 10.1117/12.47212
Show Author Affiliations
Shulin Gu, Nanjing Univ. (China)
Yuliang L. He, Nanjing Univ. (China)
Zhi Chao Wang, Nanjing Univ. (China)


Published in SPIE Proceedings Vol. 1519:
International Conference on Thin Film Physics and Applications

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