Proceedings Paper
Investigation into the characteristics of a-C:H films irradiated by electron beam| Format | Member Price | Non-Member Price |
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Paper Abstract
The characteristics of a-C:H films irradiated by different doses of electron beam have been studied by x-ray diffraction. IR absorption, Raman scattering, and resonant nuclear reaction. Such irradiation can lead the structure of a-C:H films to change in a different degree. The proportions of diamond crystalline and graphite structures in a-C:H films have a proper change simultaneously. The experimental results show a relationship to the action of hydrogen and a proper explanation is given.
Paper Details
Date Published: 1 November 1991
PDF: 4 pages
Proc. SPIE 1519, International Conference on Thin Film Physics and Applications, (1 November 1991); doi: 10.1117/12.47212
Published in SPIE Proceedings Vol. 1519:
International Conference on Thin Film Physics and Applications
PDF: 4 pages
Proc. SPIE 1519, International Conference on Thin Film Physics and Applications, (1 November 1991); doi: 10.1117/12.47212
Show Author Affiliations
Shulin Gu, Nanjing Univ. (China)
Yuliang L. He, Nanjing Univ. (China)
Yuliang L. He, Nanjing Univ. (China)
Zhi Chao Wang, Nanjing Univ. (China)
Published in SPIE Proceedings Vol. 1519:
International Conference on Thin Film Physics and Applications
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