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Proceedings Paper

Realization of a spectrometer with micromachined scanning grating
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Paper Abstract

Micro Opto Electro Mechanical Systems (MOEMS) gain more and more importance in technical applications. The combination of optical actuators and micromachined silicon technology arise possibilities to realize equipment in high volumes for reasonable prices, that have formerly been expensive laboratory equipment. This paper reports on the realization of a spectrometer in MOEMS technology. It is based on a scanning mirror chip with a grating structure on top. Thus a spectrometer was realized, on which the wavelength range can be selected. The resolution is not limited by line width of a multisensor detector, as it is the case for state of the art low cost spectrometers. A single detector is used, cheaper than arrays and available for all wavelength ranges. The setup can be small and light, the grating withstands shocks and vibration much better than a classical spectrometer. The grating moves with a frequency of 500 Hz respectively 1000 Hz, a whole spectrum is acquired within milliseconds. The resolution is given by the grating line density and the spectrometer dimensions, as it is valid for every single detector spectrometer. Depending on the number of systems built, a price of the system can be expected significantly below those of low cost systems with fixed grating.

Paper Details

Date Published: 25 March 2003
PDF: 8 pages
Proc. SPIE 4945, MEMS/MOEMS: Advances in Photonic Communications, Sensing, Metrology, Packaging and Assembly, (25 March 2003); doi: 10.1117/12.471993
Show Author Affiliations
Heinrich Grueger, Fraunhofer-Institut fuer Mikroelektronische Schaltungen und Systeme (Germany)
Alexander Wolter, Fraunhofer-Institut fuer Mikroelektronische Schaltungen und Systeme (Germany)
Tobias Schuster, Fraunhofer-Institut fuer Mikroelektronische Schaltungen und Systeme (Germany)
Harald Schenk, Fraunhofer-Institut fuer Mikroelektronische Schaltungen und Systeme (Germany)
Hubert K. Lakner, Fraunhofer-Institut fuer Mikroelektronische Schaltungen und Systeme (Germany)


Published in SPIE Proceedings Vol. 4945:
MEMS/MOEMS: Advances in Photonic Communications, Sensing, Metrology, Packaging and Assembly

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