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Proceedings Paper

Arrays of spherical micromirrors and molded microlenses fabricated with bulk Si micromachining
Author(s): Gleb V. Vdovin; Ourang Akhzar-Mehr; Pasqualina M. Sarro; Davies W. De Lima Monteiro; Mikhail Yu. Loktev
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Paper Abstract

We have extended the technology of fabrication of optical spherical mirrors by using single-mask bulk micromachining to fabricate highly-uniform spherical arrays of micro-mirrors and to mold polymer-on-glass microlenses. The arrays fabricated feature 100% optical fill factor and very high field uniformity of optical characteristics of individual micro-mirrors (lenses). The technology is specially suitable for the fabrication of uniform arrays of spherical mirrors with small numerical apertures for use in Hartmann-Shack wavefront sensors. Optical tests with the hexagonal array of molded microlenses with pitch of 300μm and focal length of ~30mm demonstrated that the contribution of microlens imperfections into the wavefront reconstruction error does not exceed λ/50 rms.

Paper Details

Date Published: 25 March 2003
PDF: 5 pages
Proc. SPIE 4945, MEMS/MOEMS: Advances in Photonic Communications, Sensing, Metrology, Packaging and Assembly, (25 March 2003); doi: 10.1117/12.471992
Show Author Affiliations
Gleb V. Vdovin, Technische Univ. Delft (Netherlands)
OKO Technologies (Netherlands)
Ourang Akhzar-Mehr, Technische Univ. Delft (Netherlands)
Pasqualina M. Sarro, Technische Univ. Delft (Netherlands)
Davies W. De Lima Monteiro, Technische Univ. Delft (Netherlands)
Mikhail Yu. Loktev, Technische Univ. Delft (Netherlands)


Published in SPIE Proceedings Vol. 4945:
MEMS/MOEMS: Advances in Photonic Communications, Sensing, Metrology, Packaging and Assembly

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