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Proceedings Paper

Continuously tunable InP-based multiple air-gap MOEMS filters with ultrawide tuning range
Author(s): Soeren Irmer; Juergen Daleiden; Ventzeslav Rangelov; Cornelia Prott; Friedhard Roemer; Martin Strassner; Amer Tarraf; Hartmut Hillmer
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Paper Abstract

Continuously tunable Fabry-Perot filters manufactured using multiple air-gap MOEMS technology are studied and presented. The InP/air-gap filters optimized for optical telecommunication systems using the third optical telecommunication window (1550nm) exhibit a wide tuning range of 142nm and an extremely wide stop-band of 550nm (1250nm-1800nm). The tuning is continuously adjustable requiring ultra-low actuation voltages between 0V (1599nm) and 3.2V (1457nm). The filters are based on a relatively simple vertical structure which is fabricated by few surface micro machining steps. No mirror alignment or subsequent micro mounting are necessary facilitating a compact batch process production.

Paper Details

Date Published: 25 March 2003
PDF: 9 pages
Proc. SPIE 4945, MEMS/MOEMS: Advances in Photonic Communications, Sensing, Metrology, Packaging and Assembly, (25 March 2003); doi: 10.1117/12.471977
Show Author Affiliations
Soeren Irmer, Univ. Kassel (Germany)
Juergen Daleiden, Univ. Kassel (Germany)
Ventzeslav Rangelov, Univ. Kassel (Germany)
Cornelia Prott, Univ. Kassel (Germany)
Friedhard Roemer, Univ. Kassel (Germany)
Martin Strassner, Royal Institute of Technology (Sweden)
Amer Tarraf, Univ. Kassel (Germany)
Hartmut Hillmer, Univ. Kassel (Germany)


Published in SPIE Proceedings Vol. 4945:
MEMS/MOEMS: Advances in Photonic Communications, Sensing, Metrology, Packaging and Assembly

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