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Proceedings Paper

Ion implantation of diamond-like carbon films
Author(s): Jin Zhong Xiang; Zhi Hao Zheng; Changgeng Liao; Jing Xiong; Yong Qiang Wang; Fang-Qing Zhang
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Paper Abstract

Diamond-like carbon (DLC) films (a-C:H) were implanted by 140 keV and 110 keV Ar ion beams. The characteristics of the implanted films decreased dramatically under a dose of 2 X 1016 Ar/cm2. IR spectra and optical gap Epot were measured. It was found that the SP2 and SP3 components decreased due to the loss of hydrogen during implantation, and the ratio of components SP2 bonds to SP3 bonds increased with the ion dose. And the optical gap Epot decreased from 1.46 eV to 0.83 eV. The hydrogen (bonded and unbonded) contents in the films were measured with the nuclear resonant reaction 1H (19F,) 16O. It is shown that hydrogen plays an important role in affecting some properties of DLC films.

Paper Details

Date Published: 1 November 1991
PDF: 5 pages
Proc. SPIE 1519, International Conference on Thin Film Physics and Applications, (1 November 1991); doi: 10.1117/12.47193
Show Author Affiliations
Jin Zhong Xiang, East China Normal Univ. (China)
Zhi Hao Zheng, East China Normal Univ. (China)
Changgeng Liao, Lanzhou Univ. (China)
Jing Xiong, Shanghai Institute of Metallurgy (China)
Yong Qiang Wang, Lanzhou Univ. (China)
Fang-Qing Zhang, Lanzhou Univ. (China)


Published in SPIE Proceedings Vol. 1519:
International Conference on Thin Film Physics and Applications

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