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Proceedings Paper

Fabrication of microfluidic device (diffuser or mixer) using aerosol deposition method
Author(s): Jun Akedo; Maxim Lebedev
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Paper Abstract

Aerosol deposition method (ADM) is a high performance technique for fabricating of piezoelectric 1-100- micron- thick film on various kinds of substrate. High deposition rate (over 30 micron/min for area 5 mm × 5 mm), low process temperature (less than 600 °C) as well as micropatterning of PZT during deposition (without etching) are very attractive for MEMS, and micro-TAS applications. In this presentation, the performance of a Si diaphragm driven by PZT thick film deposited by ADM was investigated from the point of view of applications for micro-diffuser. To find optimum conditions of diffuser, 4 ~ 60-micron-thick PZT films were directly deposited onto 10 ~ 140-micron-thick Si substrate. Displacement of 65-micron-thick Si diaphragm ( 6 mm × 6 mm) driven by 14-micron-thick PZT film was 1.2 micron at 40 V ac at non-resonance frequency and was 24 micron at resonance of 22.4 kHz driven by 8 V. The influence of liquid loads on resonance frequency shift and fluidic follow were investigated as the first report.

Paper Details

Date Published: 13 November 2002
PDF: 7 pages
Proc. SPIE 4936, Nano- and Microtechnology: Materials, Processes, Packaging, and Systems, (13 November 2002); doi: 10.1117/12.471922
Show Author Affiliations
Jun Akedo, National Institute of Advanced Industrial Science and Technology (Japan)
Maxim Lebedev, National Institute of Advanced Industrial Science and Technology (Japan)


Published in SPIE Proceedings Vol. 4936:
Nano- and Microtechnology: Materials, Processes, Packaging, and Systems
Dinesh K. Sood; Ajay P. Malshe; Ryutaro Maeda, Editor(s)

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