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Proceedings Paper

Research on the 1D PSD
Author(s): Xiangqun Cao; Bin Lin; Meizhen Huang; Xuming Wu; Yuqing Chen
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Paper Abstract

Position Sensitive Detector (PSD) is a device utilizing the lateral photoelectric that produced by the non-uniform illumination of a rectifying semiconductor junction. The linear requirement, spectral responds, position detection error of 1D PSD were presented in this paper. All these studied works are the theoretical basis for designing and fabrication PSD with excellent performance. The experimental results show that the rms non-linearity and the typcial position error are 0.1% of full length (8 mm) and ±5μm.

Paper Details

Date Published: 20 September 2002
PDF: 5 pages
Proc. SPIE 4919, Advanced Materials and Devices for Sensing and Imaging, (20 September 2002); doi: 10.1117/12.471904
Show Author Affiliations
Xiangqun Cao, Zhejiang Univ. (China)
Bin Lin, Zhejiang Univ. (China)
Meizhen Huang, Zhejiang Univ. (China)
Xuming Wu, Zhejiang Univ (China)
Yuqing Chen, Zhejiang Univ. (China)

Published in SPIE Proceedings Vol. 4919:
Advanced Materials and Devices for Sensing and Imaging
Jianquan Yao; Yukihiro Ishii, Editor(s)

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