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Proceedings Paper

Performance parameter of 2D position-sensitive detector
Author(s): Bin Lin; Meizhen Huang; Xiaobin Shun; Xiangqun Cao
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Paper Abstract

The performance parameter of 2D Position Sensitive Detector (PSD) are analyzed and calculated theoretically. The non-linearity and distortion grid map of the theoretical calculation using this structure position formula are in good agreement with the experimental result. The experimental results show that with the signal processor, the position non-linearity (rms) is less than 0.15% in the 60% range of a 13 mm x 13 mm active area, the position error is less than ±20 μm. It has demonstrated that 2D PSD was obtained the best position non-linearity results of 13 mm x 13 mm.

Paper Details

Date Published: 20 September 2002
PDF: 6 pages
Proc. SPIE 4919, Advanced Materials and Devices for Sensing and Imaging, (20 September 2002); doi: 10.1117/12.471903
Show Author Affiliations
Bin Lin, Zhejiang Univ. (China)
Meizhen Huang, Shanghai Jiaotong Univ. (China)
Xiaobin Shun, Zhejiang Univ (China)
Xiangqun Cao, Zhejiang Univ. (China)

Published in SPIE Proceedings Vol. 4919:
Advanced Materials and Devices for Sensing and Imaging
Jianquan Yao; Yukihiro Ishii, Editor(s)

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