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Proceedings Paper

Amorphous silicon periodic and quasiperiodic superlattices
Author(s): Kun-Ji Chen; Jia Fang Du; Zhifeng Li; Jun Xu; Jian Gong Jiang; Duan Feng; Hellmut Fritzsche
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Paper Abstract

The a-Si:H based compositional periodic and quasiperiodic superlattices (SLs) have been investigated by low-angle x-ray diffraction, Auger electron spectrum (AES), and cross-section TEM micrograph experiments. We show that most of the structures have sharp and smooth interfaces to better than 6 angstrom. The results also indicate that the peculiarities of quasiperiodic a-Si:H SLs are very different from those of periodic structures. The quantum size effects in a-Si:H SLs has been verified by the wavelength differential absorption (WDA) spectrum measurements.

Paper Details

Date Published: 1 November 1991
PDF: 8 pages
Proc. SPIE 1519, International Conference on Thin Film Physics and Applications, (1 November 1991); doi: 10.1117/12.47190
Show Author Affiliations
Kun-Ji Chen, Nanjing Univ. (China)
Jia Fang Du, Nanjing Univ. (China)
Zhifeng Li, Nanjing Univ. (China)
Jun Xu, Nanjing Univ. (China)
Jian Gong Jiang, Nanjing Univ. (China)
Duan Feng, Nanjing Univ. (China)
Hellmut Fritzsche, Univ. of Chicago (United States)


Published in SPIE Proceedings Vol. 1519:
International Conference on Thin Film Physics and Applications

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