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Proceedings Paper

Laser gap sensor used in electrostatic suspension system with optoelectronic feedback control
Author(s): Shu-wen Cheng; Hai-jun Zhang; Xin-jie Wang
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Paper Abstract

To implement electrostatic suspension with optoelectronic feedback control (ESOFC), real-time detection of the gap between the suspended object and the electrode is needed to determine the position of the object. In this article, we designed a laser gap sensor based on the principle of laser trigonometry, and developed a novel method to calibrate the nonlinearity of the conventional laser trigonometry by using a simple nonlinearity-correction circuit. Experiments show that this optimized sensor has an accuracy better than 7 μm when controlling the gap within the range from -2.0 mm to +2.0 mm, which meets the need of our ESOFC system quite well. Furthermore, it can also be widely applied in other displacement-detecting systems.

Paper Details

Date Published: 20 September 2002
PDF: 8 pages
Proc. SPIE 4919, Advanced Materials and Devices for Sensing and Imaging, (20 September 2002); doi: 10.1117/12.471874
Show Author Affiliations
Shu-wen Cheng, Zhejiang Univ. (China)
Hai-jun Zhang, Zhejiang Univ. (China)
Xin-jie Wang, Zhejiang Univ. (China)

Published in SPIE Proceedings Vol. 4919:
Advanced Materials and Devices for Sensing and Imaging
Jianquan Yao; Yukihiro Ishii, Editor(s)

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