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Proceedings Paper

Real-time far distance microvibration measurement using an external cavity semiconductor laser interferometer with a feedback control system
Author(s): Weirui Zhao; Pengfei Jiang; Fuzeng Xie
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Paper Abstract

An external cavity semiconductor laser interferometer used to measure far distance micro-vibration in real time is proposed. In the interferometer, a single longitudinal mode and excellent coherent characteristic grating external cavity semiconductor laser is constructed and acted as a light source and a phase compensator. Its coherent length exceeds 200 meters. The angle between normal and incidence beam of the far object is allowed to change in definite range during the measurement with this interferometer, and this makes the far distance interference measurement easier and more convenient. Also, it is not required to keep the amplitudes of the first and second harmonic components equal, and then the dynamic range is increased. A feedback control system is used to compensate the phase disturbance between the two interference beams introduced by environmental vibration.

Paper Details

Date Published: 20 September 2002
PDF: 5 pages
Proc. SPIE 4927, Optical Design and Testing, (20 September 2002); doi: 10.1117/12.471707
Show Author Affiliations
Weirui Zhao, Institute of Semiconductors (China)
Pengfei Jiang, Institute of Semiconductors (China)
Fuzeng Xie, Institute of Semiconductors (China)

Published in SPIE Proceedings Vol. 4927:
Optical Design and Testing
Zhicheng Weng; Jose M. Sasian; Yongtian Wang, Editor(s)

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