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Proceedings Paper

Processing of silicon by Nd:YAG lasers with harmonics generation
Author(s): Michael Panzner; Jorg Kasper; Hendrik Wust; Udo Klotzbach; Eckhard Beyer
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Paper Abstract

Micro structures in silicon are applied in different fields of industry, medicine and research. Examples are micro mechanical sensors for car security systems, nozzle plates for printer, and optical elements for x-ray beam splitting. Wherever the accuracy of etched silicon structures is not required, laser processes with short pulses and small wave length can be an option with the advantage of shorter process time. In this contribution the possibilities and limits of laser machining of Si by diode pumped Nd:YAG lasers with harmonics generation will be presented by means of structures processed by application of a scanner with f- theta-optic. The result will be discussed concerning the experimental setup and the laser parameters.

Paper Details

Date Published: 18 June 2002
PDF: 9 pages
Proc. SPIE 4637, Photon Processing in Microelectronics and Photonics, (18 June 2002); doi: 10.1117/12.470659
Show Author Affiliations
Michael Panzner, Fraunhofer Institute of Material and Beam Technology (Germany)
Jorg Kasper, Fraunhofer Institute of Material and Beam Technology (Germany)
Hendrik Wust, Fraunhofer Institute of Material and Beam Technology (Germany)
Udo Klotzbach, Fraunhofer Institute of Material and Beam Technology (Germany)
Eckhard Beyer, Fraunhofer Institute of Material and Beam Technology (Germany)


Published in SPIE Proceedings Vol. 4637:
Photon Processing in Microelectronics and Photonics
Jan J. Dubowski; Willem Hoving; Koji Sugioka; Malcolm C. Gower; Richard F. Haglund; Alberto Pique; Frank Traeger; Jan J. Dubowski; Willem Hoving, Editor(s)

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