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Proceedings Paper

Physical and chemical aspects of laser-materials interactions relevant to laser processing
Author(s): J. Thomas Dickinson
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Paper Abstract

The use of lasers in packaging and materials processing is an increasingly attractive choice for high technology manufacturing. As we push for more demanding materials processing tasks and smaller dimensions, an understanding of the underlying physical and chemical aspects of problems becomes important. Here we discuss some of these issues relevant to materials processing.

Paper Details

Date Published: 18 June 2002
PDF: 12 pages
Proc. SPIE 4637, Photon Processing in Microelectronics and Photonics, (18 June 2002); doi: 10.1117/12.470653
Show Author Affiliations
J. Thomas Dickinson, Washington State Univ. (United States)


Published in SPIE Proceedings Vol. 4637:
Photon Processing in Microelectronics and Photonics
Jan J. Dubowski; Willem Hoving; Koji Sugioka; Malcolm C. Gower; Richard F. Haglund; Alberto Pique; Frank Traeger; Jan J. Dubowski; Willem Hoving, Editor(s)

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