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Proceedings Paper

Crack-free laser processing of glass substrate and its mechanisms
Author(s): Ming Hui Hong; Koji Sugioka; Ding Jiang Wu; L. L. Wong; Yongfeng Lu; Katsumi Midorikawa; Tow Chong Chong
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Paper Abstract

Laser-induced -plasma-assisted ablation for crack-free laser processing of glass substrate is investigated. Different form laser breakdown at high laser fluence, a pulsed green laser is used to achieve the glass processing in air at much lower laser fluence. Laser beam goes though eh substrate first and then irradiates on a solid target behind. For laser fluence above target ablation threshold, plasma generated from target behind. For laser fluence above target ablation threshold, plasma generated from target ablation flies forward at a high speed. At a small target-to- substrate distance, there are strong interactions among laser light, target plasma and glass substrate at its rear side surface. With the target materials deposition on the glass surface or even doping into the glass substrate, light absorption characteristic at the near side surface is modified. The laser processing result is closely related to target-to-substrate distance, laser scanning speed and its repetition rate. Color marking, glass metalization and structuring can be achieved with the fine tune of the laser processing parameters.

Paper Details

Date Published: 18 June 2002
PDF: 10 pages
Proc. SPIE 4637, Photon Processing in Microelectronics and Photonics, (18 June 2002); doi: 10.1117/12.470632
Show Author Affiliations
Ming Hui Hong, Data Storage Institute (Singapore)
Koji Sugioka, RIKEN-The Institute of Physical and Chemical Research (Japan)
Ding Jiang Wu, Data Storage Institute (Singapore)
L. L. Wong, Data Storage Institute (Singapore)
Yongfeng Lu, Data Storage Institute (United States)
Katsumi Midorikawa, RIKEN-The Institute of Physical and Chemical Research (Japan)
Tow Chong Chong, Data Storage Institute (Singapore)


Published in SPIE Proceedings Vol. 4637:
Photon Processing in Microelectronics and Photonics
Jan J. Dubowski; Willem Hoving; Koji Sugioka; Malcolm C. Gower; Richard F. Haglund; Alberto Pique; Frank Traeger; Jan J. Dubowski; Willem Hoving, Editor(s)

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