Share Email Print
cover

Proceedings Paper

Laser ablation of nitrogen-solid films by UV ps-laser irradiation: surface modification of materials by fragments in laser ablation plume
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

Laser ablation of nitrogen solid film deposited on a copper plate at 10 K was investigated by the irradiation of a picosecond UV laser at 263 nm in vacuum. Photo-dissociation of nitrogen molecule in the solid film was confirmed by the optical emissions, which were ascribed to atomic nitrogen, during the laser irradiation at the fluence of 5 J cm-2 pulse-1. This photolysis was discussed by the comparison with laser-induced breakdown of nitrogen gas. At the fluence over ca. 10 J cm-2 pulse-1, the ablation of the frozen nitrogen film was observed. Employing the ablation plume including a reactive species such as nitrogen atoms, the surface reaction of a graphite oriented pyrolytic graphite plate and silicon wafer was studied. XPS analysis indicated that nitrides were formed on the surfaces by the treatment. The ps-laser ablation of nitrogen solid film provides a novel technique for surface modification of materials.

Paper Details

Date Published: 18 June 2002
PDF: 13 pages
Proc. SPIE 4637, Photon Processing in Microelectronics and Photonics, (18 June 2002); doi: 10.1117/12.470615
Show Author Affiliations
Hiroyuki Niino, National Institute of Advanced Industrial Science and Technology (Japan)
Tadatake Sato, National Institute of Advanced Industrial Science and Technology (Japan)
Aiko Narazaki, National Institute of Advanced Industrial Science and Technology (Japan)
Yoshizo Kawaguchi, National Institute of Advanced Industrial Science and Technology (Japan)
Akira Yabe, National Institute of Advanced Industrial Science and Technology (Japan)


Published in SPIE Proceedings Vol. 4637:
Photon Processing in Microelectronics and Photonics
Jan J. Dubowski; Willem Hoving; Koji Sugioka; Malcolm C. Gower; Richard F. Haglund; Alberto Pique; Frank Traeger; Jan J. Dubowski; Willem Hoving, Editor(s)

© SPIE. Terms of Use
Back to Top