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Proceedings Paper

Process-dependent kinoform performance
Author(s): J. Allen Cox; Bernard S. Fritz; Thomas R. Werner
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Paper Abstract

Results are presented of an on-going experimental program to characterize the effects of processing errors on kinoform performance. Diffraction efficiency and modulation transfer function data are given for various types of processing errors present in staircase kinoforms of a f/10 Fresnel phase lens having two and four levels. Processing errors include etch depth, linewidth, and mask alignment. Processing errors, especially mask alignment, are shown to have the greatest impact on diffraction efficiency and very little effect on image quality.

Paper Details

Date Published: 1 September 1991
PDF: 10 pages
Proc. SPIE 1507, Holographic Optics III: Principles and Applications, (1 September 1991); doi: 10.1117/12.47032
Show Author Affiliations
J. Allen Cox, Honeywell Systems and Research Ctr. (United States)
Bernard S. Fritz, Honeywell Systems and Research Ctr. (United States)
Thomas R. Werner, Honeywell Systems and Research Ctr. (United States)


Published in SPIE Proceedings Vol. 1507:
Holographic Optics III: Principles and Applications
G. Michael Morris, Editor(s)

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