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Proceedings Paper

Surface structure and optical properties of proton-exchanged Ti-diffused LiNbO3 waveguides
Author(s): Ivan E. Kalabin; Tatiana I. Grigorieva; Lev D. Pokrovsky; Dmitriy V. Sheglov; Denis I. Shevtsov; Victor V. Atuchin
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Paper Abstract

The topmost surface of crystal after all stages of proton-exchanged Ti-indiffused LiNbO3 waveguide preparation was studied using atomic force microscopy and high energy electron diffraction. The formation of the flat terraces with minimal height step ~0.24 nm as a result of high temperature annealing has been detected. The global changing of crystal surface morphology induced by Ti diffusing was observed. Ion exchange has no influence upon surface microrelief. No new phase formation on the surface was detected. The stability of refractive index was investigated.

Paper Details

Date Published: 3 April 2003
PDF: 4 pages
Proc. SPIE 4944, Integrated Optical Devices: Fabrication and Testing, (3 April 2003); doi: 10.1117/12.470232
Show Author Affiliations
Ivan E. Kalabin, Institute of Semiconductor Physics (Russia)
Tatiana I. Grigorieva, Institute of Semiconductor Physics (Russia)
Lev D. Pokrovsky, Institute of Semiconductor Physics (Russia)
Dmitriy V. Sheglov, Institute of Semiconductor Physics (Russia)
Denis I. Shevtsov, Perm State Univ. (Russia)
Victor V. Atuchin, Institute of Semiconductor Physics (Russia)

Published in SPIE Proceedings Vol. 4944:
Integrated Optical Devices: Fabrication and Testing

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