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Proceedings Paper

Diffractive micro-arrays for active spectroscopy and interconnect applications
Author(s): James Castracane; Bai Xu; Olga N. Gutin; Rein Lavrijsen; Andrew Stollenwerk
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Paper Abstract

The use of Micro-Electro-Mechanical Systems (MEMS) technology has opened the door for many applications. In particular, by exploiting the reconfigurability of optical surfaces fabricated with this technology, many sensor, communication and spectroscopic systems can benefit. The controlled re-direction of single or multiple optical input sources can lend itself to high throughput sample analysis or massively parallel optical connectivity. In addition, the change in a MEMS-based optical surface can result in a flexible spectral analysis of incoming radiation. We report on the recent advances in our projects which are focused on the design/simulation, materials processing and integration issues involved with the creation and optimized operation of such diffractive micro-arrays. In this presentation, the state of the art in such devices will be presented which will include the process flow associated with production, structural metrology, optical performance, and parallel switching capabilities of the systems. The use of numerous materials including polysilicon, silicon dioxide and selected polymers as structural layers has enabled the production of devices which can be tailored for specific, performance related applications. Examples to be presented include diffractive surfaces with substantial (1 cm x 1 cm) active areas as well as large arrays with sub-micron feature sizes. Functional integration of the prototype devices include optical interconnects, active spectroscopy and bio/chem diagnostic systems.

Paper Details

Date Published: 10 June 2002
PDF: 9 pages
Proc. SPIE 4647, Functional Integration of Opto-Electro-Mechanical Devices and Systems II, (10 June 2002); doi: 10.1117/12.469823
Show Author Affiliations
James Castracane, Univ. at Albany (United States)
Bai Xu, Univ. at Albany (United States)
Olga N. Gutin, InterScience, Inc. (United States)
Rein Lavrijsen, Univ. at Albany (United States)
Andrew Stollenwerk, Univ. at Albany (United States)

Published in SPIE Proceedings Vol. 4647:
Functional Integration of Opto-Electro-Mechanical Devices and Systems II
Michael R. Descour; Juha T. Rantala, Editor(s)

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