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Proceedings Paper

Ba(Mg1/3Ta2/3)O3 substrate for BaxSr1-xTiO3 thin film used for phase shifter
Author(s): Chunlin Fu; Hongwei Chen; Chungen Huang; Jiang Hu; Wencheng Hu; Wenyuan Li; Chuanren Yang
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Paper Abstract

Barium strontium titanate, BaxSr1-xTiO3 (BST for short), thin films are grown on the substrates of barium magnesium tantalite, Ba(Mg1/3Ta2/3)O3 (BMT for short), by pulsed laser deposition (PLD) technique. The microstructures and electric properties of Ba(Mg1/3Ta2/3)O3 ceramics and BaxSr1-xTiO3 films are investigated, and the phase shifter is fabricated. Both Ba(Mg1/3Ta2/3)O3 and BaxSr1-xTiO3 have perovskite structure and BMT ceramics has high Q0 at microwave frequency , so BMT substrate is compatible and suitable for BST films. The dielectric constant and dielectric loss of the BST films are 510 and 2% respectively , and about 50% dielectric constant tunability is achieved with an electric field bias of 3v/μm. The dielectric loss of BST films shows no obvious change with the electric fields. About 50° of phase shift has obtained with an electric field bias of 2v/μm at 5GHz .

Paper Details

Date Published: 13 November 2002
PDF: 10 pages
Proc. SPIE 4936, Nano- and Microtechnology: Materials, Processes, Packaging, and Systems, (13 November 2002); doi: 10.1117/12.469680
Show Author Affiliations
Chunlin Fu, Univ. of Electronic Science and Technology of China (China)
Hongwei Chen, Univ. of Electronic Science and Technology of China (China)
Chungen Huang, Univ. of Electronic Science and Technology of China (China)
Jiang Hu, Univ. of Electronic Science and Technology of China (China)
Wencheng Hu, Univ. of Electronic Science and Technology of China (China)
Wenyuan Li, Univ. of Electronic Science and Technology of China (China)
Chuanren Yang, Univ. of Electronic Science and Technology of China (China)


Published in SPIE Proceedings Vol. 4936:
Nano- and Microtechnology: Materials, Processes, Packaging, and Systems
Dinesh K. Sood; Ajay P. Malshe; Ryutaro Maeda, Editor(s)

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