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Proceedings Paper

Study of hot embossed microchannels using confocal microscopy
Author(s): Irina Simdikova; Armin Kueper; Igor Sbarski; Erol C. Harvey; Jason P. Hayes
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Paper Abstract

Micro molding and hot embossing are among the most popular techniques for fabricating microstructures in polymeric materials, due to the relatively low cost of replication. In this paper we present an investigation of a hot embossing process including the optimisation of operating parameters for polystyrene (PS) and polycarbonate (PC) substrate materials. Nickel mold inserts were made via excimer-laser ablation and Ni electrodeposition. Replication of structures, such as channels with different aspect ratios, were investigated and experimental results are discussed.

Paper Details

Date Published: 13 November 2002
PDF: 11 pages
Proc. SPIE 4936, Nano- and Microtechnology: Materials, Processes, Packaging, and Systems, (13 November 2002); doi: 10.1117/12.469671
Show Author Affiliations
Irina Simdikova, Swinburne Univ. of Technology (Australia)
Armin Kueper, Swinburne Univ. of Technology (Australia)
Igor Sbarski, Swinburne Univ. of Technology (Australia)
Erol C. Harvey, Swinburne Univ. of Technology (Australia)
Jason P. Hayes, Swinburne Univ. of Technology (Australia)

Published in SPIE Proceedings Vol. 4936:
Nano- and Microtechnology: Materials, Processes, Packaging, and Systems
Dinesh K. Sood; Ajay P. Malshe; Ryutaro Maeda, Editor(s)

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