Share Email Print
cover

Proceedings Paper

Kilowatt-range high-repetition-rate excimer lasers
Author(s): Vladimir M. Borisov; Oleg B. Khristoforov; Yurii B. Kirykhin; S. G. Kuznetsov; Yu. Yu. Stepanov; Aleksandr Yu. Vinokhodov
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

High-power operation of excimer lasers was investigated using UV-preionization schemes based on a dielectric surface creeping discharge. The design and operation of the high average power excimer laser systems are described. A large-aperture (10 X 7 cm2) XeCl laser with UV preionization can produce 10 J per pulse at a repetition rate of up to 100 Hz. When the aperture was decreased, the XeCl laser operated at repetition rates of up to 500 Hz and could produce average output power of more than 600 W.

Paper Details

Date Published: 1 September 1991
PDF: 8 pages
Proc. SPIE 1503, Excimer Lasers and Applications III, (1 September 1991); doi: 10.1117/12.46961
Show Author Affiliations
Vladimir M. Borisov, Kurchatov Research Institute (Russia)
Oleg B. Khristoforov, Kurchatov Research Institute (Russia)
Yurii B. Kirykhin, Kurchatov Research Institute (Russia)
S. G. Kuznetsov, Kurchatov Research Institute (Russia)
Yu. Yu. Stepanov, Kurchatov Research Institute (Russia)
Aleksandr Yu. Vinokhodov, Kurchatov Research Institute (Russia)


Published in SPIE Proceedings Vol. 1503:
Excimer Lasers and Applications III
Tommaso Letardi; Lucien Diego Laude, Editor(s)

© SPIE. Terms of Use
Back to Top