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Proceedings Paper

Cantilever microscanners for free-space optical interconnects
Author(s): Bai Xu; Natalya Tokranova; James Castracane; Dong Yan
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Paper Abstract

Two-dimensional (2D) scanners can be used for displays, printers, optical data storage devices, optical scanning microscopes, and free-space optical interconnects. In this paper, we will describe the modeling and simulation of a novel cantilever microscanner. The scanner is actuated using electrostatic force. The cantilever beam connects to the top electrode. The bottom four electrodes on the substrate provide extra feedback for the control of the cantilever beam. A thorough mechanical analysis (both static and dynamic) using Finite Element Analysis has been performed. Key design parameters such as driving voltage, tilt angle and resonant frequencies have been investigated. The model has not been verified by experimental data but a fabrication process flow has been designed. The fabrication of this novel cantilever microscanner is in progress.

Paper Details

Date Published: 3 June 2002
PDF: 8 pages
Proc. SPIE 4652, Optoelectronic Interconnects, Integrated Circuits, and Packaging, (3 June 2002); doi: 10.1117/12.469569
Show Author Affiliations
Bai Xu, SUNY/Albany (United States)
Natalya Tokranova, SUNY/Albany (United States)
James Castracane, SUNY/Albany (United States)
Dong Yan, SUNY/Albany (United States)


Published in SPIE Proceedings Vol. 4652:
Optoelectronic Interconnects, Integrated Circuits, and Packaging
Louay A. Eldada; Randy A. Heyler; John R. Rowlette; John R. Rowlette; Randy A. Heyler, Editor(s)

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