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Proceedings Paper

Excimer laser processing of diamond-like films
Author(s): Vladimir G. Ageev; T. N. Glushko; V. F. Dorfman; A. V. Kuzmichov; B. N. Pypkin
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Paper Abstract

Basic regimes of the KrF-laser-assisted patterning of a-C:H and of W-alloyed a-C/Si/O:H diamond-like films (DLF) of dielectrical and metal-like varieties are studied. Laser-induced processes of the film graphitization and ablation under the multipulsed irradiation are considered. The submicron resolution of the film structurization is shown to be possible by using the ablative projection UV laser lithography.

Paper Details

Date Published: 1 September 1991
PDF: 10 pages
Proc. SPIE 1503, Excimer Lasers and Applications III, (1 September 1991); doi: 10.1117/12.46956
Show Author Affiliations
Vladimir G. Ageev, General Physics Institute (Russia)
T. N. Glushko, General Physics Institute (Russia)
V. F. Dorfman, Institute of Electronic Controlling Devices (Russia)
A. V. Kuzmichov, General Physics Institute (Russia)
B. N. Pypkin, Institute of Electronic Controlling Devices (Russia)

Published in SPIE Proceedings Vol. 1503:
Excimer Lasers and Applications III
Tommaso Letardi; Lucien Diego Laude, Editor(s)

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