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Proceedings Paper

Micromachined magnetometer-accelerometer for navigation systems
Author(s): Ji-Man Cho; Kyung Soo Kim; Seungdo An; HoJoon Park; Ghun Hahm
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Paper Abstract

A new type of magnetometer-accelerometer is developed with a silicon micromachining. The operation principle of the sensor is based on the well known Lorentz force caused by the interaction of a current and an external magnetic field on a suspended conducting beam. To realize a new resonant micro sensor detecting both acceleration and the geomagnetic field simultaneously, a conducting line is formed on a spring part of a silicon accelerometer having two mass plates. And a new Samsung MEMS fabrication process is developed for this sensor. The process uses a silicon-on-glass (SOG) wafer, an inverted SOG wafer, and a gold-silicon eutectic bonding for the wafer-level hermetic packaging. To operate the sensor, an ac current of its mechanical resonant frequency is driven through the conducting line. Totally 1 mW is consumed in the current driving element. This newly developed sensor is enough for the 10 degree electronic display of the orientation angle and can be used in a portable navigator such as SmartPhones and PDAs that need a small, low cost and low power electronic compass.

Paper Details

Date Published: 13 November 2002
PDF: 9 pages
Proc. SPIE 4936, Nano- and Microtechnology: Materials, Processes, Packaging, and Systems, (13 November 2002); doi: 10.1117/12.469429
Show Author Affiliations
Ji-Man Cho, Samsung Electromechanics Co., Ltd. (South Korea)
Kyung Soo Kim, Samsung Electromechanics Co., Ltd. (South Korea)
Seungdo An, Samsung Electromechanics Co., Ltd. (South Korea)
HoJoon Park, Samsung Electromechanics Co., Ltd. (South Korea)
Ghun Hahm, Samsung Electromechanics Co., Ltd. (South Korea)


Published in SPIE Proceedings Vol. 4936:
Nano- and Microtechnology: Materials, Processes, Packaging, and Systems
Dinesh K. Sood; Ajay P. Malshe; Ryutaro Maeda, Editor(s)

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