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Proceedings Paper

An integrated biochip design and fabrication
Author(s): Zhan Zhao; Dafu Cui; Shanhong Xia; Zheng Cui
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Paper Abstract

Polymerase chain reaction (PCR) microvessel, capillary electrophoresis (CE) microchannel and impedance electrodes were integrated in a monolithic biochip. This paper reports on the detailed designs and fabrications of the PCR-CE-detector integrated biochip. The CE microchannel and PCR microvessel were fabricated with PDMS poured on a master made by SU-8 photoresist. The electrode plate was integrated with Au heater and temperature sensor for PCR amplification, electrodes for CE separation and impedance detection. The structure of the microfluidic channel was introduced and the impedance of microelectrodes on the chip was simulated.

Paper Details

Date Published: 13 November 2002
PDF: 6 pages
Proc. SPIE 4936, Nano- and Microtechnology: Materials, Processes, Packaging, and Systems, (13 November 2002); doi: 10.1117/12.469426
Show Author Affiliations
Zhan Zhao, Institute of Electronics (China)
Dafu Cui, Institute of Electronics (China)
Shanhong Xia, Institute of Electronics (China)
Zheng Cui, Rutherford Appleton Lab. (United Kingdom)


Published in SPIE Proceedings Vol. 4936:
Nano- and Microtechnology: Materials, Processes, Packaging, and Systems
Dinesh K. Sood; Ajay P. Malshe; Ryutaro Maeda, Editor(s)

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