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Proceedings Paper

Ablation of ITO and TO films from glass substrates
Author(s): Frode Meringdal; Harald Slinde
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Paper Abstract

The possibility of using a KrF excimer laser to remove indium-tin-oxide (ITO) and tin-oxide (TO) films from glass substrates is investigated. Etching with the excimer laser is compared with etching with a CO2 laser and a Nd:YAG laser. Patterns of removed film are made on the glass substrates using a mask imaging technique. The removal of the ITO and the TO is considered to be complete when the resistance across the removed tracks is greater than 20 M(Omega) . The length of the track is 1 cm and the width is 25 micrometers . Different substrates are tested. The fluence is varied. The results are characterized using a scanning electron microscope, by resistance measurements and by ablation depth measurements. The results are discussed.

Paper Details

Date Published: 1 September 1991
PDF: 7 pages
Proc. SPIE 1503, Excimer Lasers and Applications III, (1 September 1991); doi: 10.1117/12.46941
Show Author Affiliations
Frode Meringdal, Autodisplay AS (Norway)
Harald Slinde, Senter for Industriforskning (Norway)

Published in SPIE Proceedings Vol. 1503:
Excimer Lasers and Applications III
Tommaso Letardi; Lucien Diego Laude, Editor(s)

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