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Proceedings Paper

In-situ growth of Y1Ba2Cu3O7-x thin films using XeCl excimer and Nd:YAG lasers
Author(s): Mireille Gerri; Vladimir I. Marine; Yves Mathey; Marc L. Sentis; Philippe Ch. Delaporte; Bernard L. Fontaine; Bernard M. Forestier
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Paper Abstract

Thin films of Y1Ba2Cu3O7-x were deposited via pulsed laser ablation onto MgO and YSZ (Yttria-Stabilized Zirconia) substrates. The use of an IR Nd:YAG laser leads to nonstoichiometric deposition. The best quality superconducting films were deposited by means of UV excimer laser ablation ((lambda) equals 308 nm). These films were strongly orientated with c-axis perpendicular to (100) substrate. The film quality was found to be strongly dependent on substrate temperature, oxygen pressure, sample cooling rate and laser fluence. The deposition process was characterized by the time-resolved spectroscopic measurements of the emission from YO molecules.

Paper Details

Date Published: 1 September 1991
PDF: 12 pages
Proc. SPIE 1503, Excimer Lasers and Applications III, (1 September 1991); doi: 10.1117/12.46940
Show Author Affiliations
Mireille Gerri, URA/CNRS 783 (France)
Vladimir I. Marine, URA/CNRS 783 (France)
Yves Mathey, URA/CNRS 783 (France)
Marc L. Sentis, IMFM UM 34/CNRS (France)
Philippe Ch. Delaporte, IMFM UM 34/CNRS (France)
Bernard L. Fontaine, IMFM UM 34/CNRS (France)
Bernard M. Forestier, IMFM UM 34/CNRS (France)

Published in SPIE Proceedings Vol. 1503:
Excimer Lasers and Applications III
Tommaso Letardi; Lucien Diego Laude, Editor(s)

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