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Proceedings Paper

Surface nitride synthesis by multipulse excimer laser irradiation
Author(s): Emilia D'Anna; Gilberto Leggieri; Armando Luches; Maurizio Martino; Antonio Luigi Perrone; Guiseppe Majni; Paolo Mengucci; A. V. Drigo; Ion N. Mihailescu
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Paper Abstract

The formation of nitride surface layers on titanium plates (0.14 mm and 3 mm thick) by multipulse (100 to 500) XeCl excimer laser ((lambda) equals 308 nm) irradiation in N2 and NH3 atmospheres (1100 mbar) at a laser fluence of approximately 1 J/cm2 and repetition rate of 50 Hz, with careful experimental precautions against oxygen contamination, is studied. After irradiation, the samples were examined by scanning and transmission electron microscopy, analyzed by Rutherford backscattering and nuclear reaction techniques and by x- ray diffraction spectroscopy. All the experimental results point to the formation of pure titanium nitride layers without any detectable oxide phase

Paper Details

Date Published: 1 September 1991
PDF: 13 pages
Proc. SPIE 1503, Excimer Lasers and Applications III, (1 September 1991); doi: 10.1117/12.46938
Show Author Affiliations
Emilia D'Anna, Univ. of Lecce (Italy)
Gilberto Leggieri, Univ. of Lecce (Italy)
Armando Luches, Univ. of Lecce (Italy)
Maurizio Martino, Univ. of Lecce (Italy)
Antonio Luigi Perrone, Univ. of Lecce (Italy)
Guiseppe Majni, Univ. of Ancona (Italy)
Paolo Mengucci, Univ. of Ancona (Italy)
A. V. Drigo, Univ. of Padova (Italy)
Ion N. Mihailescu, Institute of Atomic Physics (Romania)


Published in SPIE Proceedings Vol. 1503:
Excimer Lasers and Applications III
Tommaso Letardi; Lucien Diego Laude, Editor(s)

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