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Proceedings Paper

Flexible mask specifications
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Paper Details

Date Published: 27 December 2002
PDF: 10 pages
Proc. SPIE 4889, 22nd Annual BACUS Symposium on Photomask Technology, (27 December 2002); doi: 10.1117/12.469361
Show Author Affiliations
Shigeki Nojima, Toshiba Corp. (Japan)
Shoji Mimotogi, Toshiba Corp. (Japan)
Masamitsu Itoh, Toshiba Corp. (Japan)
Osamu Ikenaga, Toshiba Corp. (Japan)
Shigeru Hasebe, Toshiba Corp. (Japan)
Kohji Hashimoto, Toshiba Corp. (Japan)
Soichi Inoue, Toshiba Corp. (Japan)
Mineo Goto, Toshiba Corp. (Japan)
Ichiro Mori, Toshiba Corp. (Japan)


Published in SPIE Proceedings Vol. 4889:
22nd Annual BACUS Symposium on Photomask Technology
Brian J. Grenon; Kurt R. Kimmel, Editor(s)

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