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Proceedings Paper

Fabrication of beam sampling grating with electron-beam direct writing
Author(s): Fuhua Gao; Yangsu Zeng; Shiwei Xie; Feng Gao; Jun Yao; Yongkang Guo; Jinglei Du; Zheng Cui
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Paper Abstract

The beam sampling grating is one of the important diffractive optical elements used in the field of laser sampling. It can be considered as an off-axis, binary phase, Fresnel zone plate. Base don the theory of interference, the principle of the variable period grating formation process is analyzed perfectly and the transmissive function of the BSG is obtained. This paper repots to fabricate the BSG with electron-beam direct writing. Compared with the holographic method, the new method is simpler, cheaper, and more efficient to manufacture elements on a large scale.

Paper Details

Date Published: 3 June 2002
PDF: 7 pages
Proc. SPIE 4659, Practical Holography XVI and Holographic Materials VIII, (3 June 2002); doi: 10.1117/12.469296
Show Author Affiliations
Fuhua Gao, Sichuan Univ. (China)
Yangsu Zeng, Sichuan Univ. (China)
Shiwei Xie, Sichuan Univ. (China)
Feng Gao, Sichuan Univ. (China)
Jun Yao, Sichuan Univ. (United Kingdom)
Yongkang Guo, Sichuan Univ. (China)
Jinglei Du, Sichuan Univ. (China)
Zheng Cui, Rutherford Appleton Lab. (United Kingdom)

Published in SPIE Proceedings Vol. 4659:
Practical Holography XVI and Holographic Materials VIII
Sylvia H. Stevenson; Stephen A. Benton; T. John Trout; Sylvia H. Stevenson; T. John Trout, Editor(s)

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