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Proceedings Paper

Excitation of an excimer laser with microwave resonator
Author(s): Lucia Huenermann; Rudolph Meyer; Franz Richter; Alexander Schnase
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Paper Abstract

Excimer laser excitation with resonant microwave structures was obtained both for XeCl* and KrF*. The discharge tube containing the laser gas is placed inside one or several coupled microwave resonators. Depending on the microwave structure, laser pulse energies up to the mJ range were achieved with XeCl*.

Paper Details

Date Published: 1 September 1991
PDF: 6 pages
Proc. SPIE 1503, Excimer Lasers and Applications III, (1 September 1991); doi: 10.1117/12.46924
Show Author Affiliations
Lucia Huenermann, Fraunhofer-Institut fuer Lasertechnik (Germany)
Rudolph Meyer, Fraunhofer-Institut fuer Lasertechnik (Germany)
Franz Richter, Karl Suess GmbH & Co. KG (Germany)
Alexander Schnase, KFA Juelich (Germany)

Published in SPIE Proceedings Vol. 1503:
Excimer Lasers and Applications III
Tommaso Letardi; Lucien Diego Laude, Editor(s)

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