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Proceedings Paper

Further developments in distributed hierarchical processing
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Paper Abstract

In the paper given by these authors this spring at Photomask Japan, investigations into the advances in the CATS tool that combine hierarchical fracturing and distributed processing were begun. In addition to the beneficial reduction in processing times, various shortcomings of the software were detailed. For this study, the next version of the CATS software tool has been made available and those shortcomings are remedied. Difficult model OPC (MOPC) fractures and complicated de-slivering fractures for variable shaped beam machines are analyzed. Timing results, exclusive-OR operations, and the implications of Amdahl’s Law are also considered. Further intricacies of Linux cluster computing are also addressed.

Paper Details

Date Published: 27 December 2002
PDF: 8 pages
Proc. SPIE 4889, 22nd Annual BACUS Symposium on Photomask Technology, (27 December 2002); doi: 10.1117/12.469151
Show Author Affiliations
Paul DePesa, Numerical Technologies, Inc. (United States)
Danny Keogan, Numerical Technologies, Inc. (United States)

Published in SPIE Proceedings Vol. 4889:
22nd Annual BACUS Symposium on Photomask Technology
Brian J. Grenon; Kurt R. Kimmel, Editor(s)

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