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Proceedings Paper

Design considerations for high-power industrial excimer lasers
Author(s): Heinz-Leonard Jetter
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Paper Abstract

The Siemens excimer laser is designed for industrial scale production processes. Its unique features are liquid dielectric capacitors, side-wise x-ray preionization, efficient cross flow gas circulation and an all metal/ceramic discharge head. All parts are integrated inside a hermetically sealed pressure vessel.

Paper Details

Date Published: 1 September 1991
PDF: 5 pages
Proc. SPIE 1503, Excimer Lasers and Applications III, (1 September 1991); doi: 10.1117/12.46914
Show Author Affiliations
Heinz-Leonard Jetter, Siemens AG (Germany)


Published in SPIE Proceedings Vol. 1503:
Excimer Lasers and Applications III
Tommaso Letardi; Lucien Diego Laude, Editor(s)

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