Share Email Print
cover

Proceedings Paper

Finite-element analysis for simulation of layered SAW devices with xy LiNbO3 substrate
Author(s): Samuel James Ippolito; Kourosh Kalantar-zadeh; Wojtek Wlodarski; David Powell
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

A finite-element method is employed to model layered Surface Acoustic Wave (SAW) two port delay lines, with a zinc oxide (ZnO) thin film guiding layer. The structure is based on x-cut, y-propagating LiNbO3 substrate. Conditions that model the realistic electrical and mechanical boundary values are applied to the structure to analyze the electromechanical properties of the SAW device. Transient analyses are performed and the frequency responses are calculated using the FFT. Simulation results show good agreement with experimental results, indicating that a finite-element method is an appropriate approach for modeling layered SAW devices.

Paper Details

Date Published: 14 November 2002
PDF: 12 pages
Proc. SPIE 4935, Smart Structures, Devices, and Systems, (14 November 2002); doi: 10.1117/12.469080
Show Author Affiliations
Samuel James Ippolito, RMIT Univ. (Australia)
Cooperative Research Ctr. for microTechnology (Australia)
Kourosh Kalantar-zadeh, RMIT Univ. (Australia)
Cooperative Research Ctr. for microTechnology (Australia)
Wojtek Wlodarski, RMIT Univ. (Australia)
Cooperative Research Ctr. for microTechnology (Australia)
David Powell, RMIT Univ. (Australia)
Cooperative Research Ctr. for microTechnology (Australia)


Published in SPIE Proceedings Vol. 4935:
Smart Structures, Devices, and Systems
Erol C. Harvey; Derek Abbott; Vijay K. Varadan, Editor(s)

© SPIE. Terms of Use
Back to Top