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Proceedings Paper

Silicon sensor integration to form smart sensors
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Paper Abstract

The use of silicon-based sensors requires the addition of external support electronics to allow for compatibility with external logging and display instruments. The development of a smart sensor technology, where the support electronics are incorporated into the sensor allows for a simpler interface. To achieve this integration techniques are required for the connection of substrate sensors with drive and support circuitry (operational amplifiers and CMOS circuitry), for effective encapsulation into a single packaged device. In this paper a literature review of basic peripheral and internal interconnect techniques is presented. Three techniques for interconnects were experimentally investigated (wraparound, thermomigration and etched micro via’s) using in-house fabrication equipment and the results presented and discussed. An integrated "smart" light sensor was constructed by forming a schotkey diode on n-type silicon. The sensor was integrated with a commercially available LM324 quad operational amplifier die and etched micro via`s were used to connect between the electronics on one side and the silicon sensor on the other side so forming a smart sensor. The light level sensor was calibrated and tested for suitability as a solar intensity monitor.

Paper Details

Date Published: 14 November 2002
PDF: 8 pages
Proc. SPIE 4935, Smart Structures, Devices, and Systems, (14 November 2002); doi: 10.1117/12.469077
Show Author Affiliations
Leon Gourdeas, Griffith Univ. (Australia)
Cooperative Research Ctr. for microTechnology (Australia)
Daniel A. James, Griffith Univ. (Australia)
Cooperative Research Ctr. for microTechnology (Australia)
David Victor Thiel, Griffith Univ. (Australia)
Cooperative Research Ctr. for microTechnology (Australia)
Le Lian See, Griffith Univ. (Australia)
Cooperative Research Ctr. for microTechnology (Australia)


Published in SPIE Proceedings Vol. 4935:
Smart Structures, Devices, and Systems
Erol C. Harvey; Derek Abbott; Vijay K. Varadan, Editor(s)

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