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Proceedings Paper

Intracavity fabrication of nanostructures on bulk materials
Author(s): Vladimir P. Osipov; Vasily V. Valyavko
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Paper Abstract

The analytical and experimental investigations describing the intracavity processing of different solid-sate materials (Al, Cr, Ge, Si) are presented. New designs of the laser cavity were explored to facilitate the fabrication of structures composed of a system of equidistant parallel 250 nm-sized grooves and periodic micro-dots on massive samples of metals and semiconductors, as well as micro-holes in thin film metallic samples.

Paper Details

Date Published: 29 May 2002
PDF: 4 pages
Proc. SPIE 4748, ICONO 2001: Fundamental Aspects of Laser-Matter Interaction and Physics of Nanostructures, (29 May 2002); doi: 10.1117/12.468990
Show Author Affiliations
Vladimir P. Osipov, B.I. Stepanov Institute of Physics (Belarus)
Vasily V. Valyavko, B.I. Stepanov Institute of Physics (Belarus)


Published in SPIE Proceedings Vol. 4748:
ICONO 2001: Fundamental Aspects of Laser-Matter Interaction and Physics of Nanostructures
Anatoly V. Andreev; Pavel A. Apanasevich; Vladimir I. Emel'yanov; Alexander P. Nizovtsev, Editor(s)

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