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Proceedings Paper

Coherent and optical methods of the diagnostics of periodic structures with the increasing sensitivity of measurements
Author(s): A. M. Lyalikov; M. Yu. Serenko
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Paper Abstract

The methods of visualization of both various defects of periodic structures and surface shape of periodic objects are considered. Experimental verification of the methods in the investigating of various transparent periodic objects is presented.

Paper Details

Date Published: 30 May 2002
PDF: 7 pages
Proc. SPIE 4749, ICONO 2001: Novel Trends in Nonlinear Laser Spectroscopy and Optical Diagnostics and Lasers in Chemistry, Biophysics, and Biomedicine, (30 May 2002); doi: 10.1117/12.468894
Show Author Affiliations
A. M. Lyalikov, Yanka Kupala Univ. of Grodno (Belarus)
M. Yu. Serenko, Yanka Kupala Univ. of Grodno (Belarus)


Published in SPIE Proceedings Vol. 4749:
ICONO 2001: Novel Trends in Nonlinear Laser Spectroscopy and Optical Diagnostics and Lasers in Chemistry, Biophysics, and Biomedicine

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