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Proceedings Paper

Microscopic imaging of semiconductor surfaces and interfaces
Author(s): Vladislav V. Yakovlev; Katerina Mikhailichenko; Sergei V. Govorkov
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Paper Abstract

We propose and experimentally demonstrate two spectroscopic techniques for microscopic imaging of water stains on the surface of semiconductors and crystal structure of the surface layers.

Paper Details

Date Published: 30 May 2002
PDF: 10 pages
Proc. SPIE 4749, ICONO 2001: Novel Trends in Nonlinear Laser Spectroscopy and Optical Diagnostics and Lasers in Chemistry, Biophysics, and Biomedicine, (30 May 2002); doi: 10.1117/12.468882
Show Author Affiliations
Vladislav V. Yakovlev, Univ. of Wisconsin/Milwaukee (United States)
Katerina Mikhailichenko, Lam Research Inc. (United States)
Sergei V. Govorkov, Lambda Physik, Inc. (United States)


Published in SPIE Proceedings Vol. 4749:
ICONO 2001: Novel Trends in Nonlinear Laser Spectroscopy and Optical Diagnostics and Lasers in Chemistry, Biophysics, and Biomedicine

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