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Proceedings Paper

Parameter calibration in topography measurement
Author(s): Yun Han; Li Ma; Shi Ping He
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Paper Abstract

In measurement of 3D object shapes using projected grating method in situ, the calibration of parameters is one of the most important factors that affect the measurement accuracy. In this paper, a study is conducted on the technique of calibrating parameters in 3D topography measurement and the Fourier phase demodulation technique is used to process the experimental data. Eth calibrations of the coordinate system and geometry parameters are provided. Some experimental results are given and the measurement sensitivity and accuracy are discussed.

Paper Details

Date Published: 29 May 2002
PDF: 4 pages
Proc. SPIE 4537, Third International Conference on Experimental Mechanics, (29 May 2002); doi: 10.1117/12.468848
Show Author Affiliations
Yun Han, Univ. of Science and Technology of China (China)
Li Ma, Univ. of Science and Technology of China (China)
Shi Ping He, Univ. of Science and Technology of China (China)


Published in SPIE Proceedings Vol. 4537:
Third International Conference on Experimental Mechanics

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