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Proceedings Paper

Heterodyne moire interferometry in micrometrology
Author(s): Yuwen Qin; Chunxia Yan; Xinhua Ji; Guangping Guo
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Paper Abstract

By modifying the hardware of a heterodyne moire interferometer (HMI) the measurement range, accuracy and efficiency of the new system can be improved significantly. With this new system, whole-field measurement of displacements and strains can be achieved by translating the photodetectors. Test results have demonstrated that this new HMI system is potentially a good alternative tool for micro-metrology.

Paper Details

Date Published: 29 May 2002
PDF: 4 pages
Proc. SPIE 4537, Third International Conference on Experimental Mechanics, (29 May 2002); doi: 10.1117/12.468843
Show Author Affiliations
Yuwen Qin, Tianjin Univ. (China)
Chunxia Yan, Tianjin Univ. (China)
Xinhua Ji, Tianjin Univ. (China)
Guangping Guo, Tianjin Univ. (China)


Published in SPIE Proceedings Vol. 4537:
Third International Conference on Experimental Mechanics

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